Small spot · Manual mapping
MProbe 40
Small-spot measurement for patterned samples and fine structures, with camera imaging to pinpoint the exact measurement location and display results directly on the sample image.
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Thin-Film Metrology · MProbe® Systems
Thin-film thickness measurement systems
MProbe® spectroscopic reflectance systems measure film thickness, optical constants (n, k) and surface roughness - trusted by thousands of companies and universities across semiconductor, medical device, solar and optical coating production.
- Thickness range
- 1 nm – 2 mm
- thickness range
- Precision
- < 0.01 nm
- measurement precision
- Materials library
- 500+
- materials in library
- Setup time
- < 20 min
- unbox to first result
Deployed across
- Semiconductor
- Medical Devices
- Solar & PV
- Optical Coatings
- Display & OLED
- Universities & Research
Product Family
One platform. A system for every line.
Every MProbe shares the same measurement engine and TFCompanion software - choose the configuration that fits your samples, spot size and process, and upgrade as you scale.
Desktop · Single spot
MProbe 20
The benchtop standard, used in thousands of applications worldwide. Thickness and refractive index from 1 nm to 1 mm with a single mouse-click - modular and easy to upgrade.
Explore MProbe 20Mapping automation
MProbe 60
Turnkey small-spot + mapping system for R&D centers and small manufacturing. 1 nm – 2 mm.
ExploreExtended range · UV–Vis
MProbe UVVis
Extended spectral range for very thin films and demanding materials, down to the UV.
ExploreCurved surfaces
MProbe HC
Coating measurement on curved parts - headlights, lenses and formed optics.
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TFCompanion™ Software
The analysis engine behind every measurement.
Included with every MProbe system and available standalone, TFCompanion turns raw reflectance, transmittance and ellipsometry spectra into physical answers.
- Analyze - thickness, n&k, roughness and bandgap from reflectance, transmittance or ellipsometry data. No limit on layers.
- Simulate - model spectra from any filmstack and optimize your measurement recipe before you run it.
- Integrate - TCP server interface for process control, plus import from all major ellipsometers and reflectometers.
- 500+ material library - with parameterized models from Cauchy to Tauc-Lorentz and Drude.
Applications
Proven where coatings are critical.
Two decades of application notes, measured on real production samples - if your film is translucent at any wavelength from UV to NIR, chances are we've already measured one like it.
Medical: Stents & Catheters
Drug-eluting and lubricious coating thickness on stents, balloons and syringes.
Semiconductor: Photoresist & Oxides
Resist, oxide and nitride thickness on wafers - single spots, small features and maps.
Automotive: Protective Coatings
Hard-coat and paint layers on headlights, trim and formed plastic parts.
Technology
Spectroscopic reflectance, engineered to the limit.
MProbe analyzes how light reflects from your sample across UV, visible and NIR wavelengths. No moving parts, results in seconds - and because opacity is a matter of wavelength, even films that look opaque to the eye can be measured in the right spectral window.
- Thickness, n&k and roughness in a single non-destructive measurement.
- Multilayer filmstacks - up to 5 independent layers, hundreds with linked-layer analysis.
- UV to NIR spectral coverage - solar absorbers, rough surfaces and thick films stay measurable.
Why Semiconsoft
You talk to the engineers who built it.
No call centers, no sales scripts. The people who answer your questions are the same engineers who have designed MProbe systems and TFCompanion software for decades.
Application support before you buy
Send us your samples and requirements - we'll verify the measurement and recommend the right configuration.
Global local support
A worldwide network of representatives, plus direct remote online access to your system when you need help fast.
Customization welcome
Special requirements, process integration, custom software or hardware - we love the challenge.
One-year warranty & updates
Every system ships with a test report, step-by-step setup instructions, technical support and software updates.
“Everybody is a thin-film measurement expert with MProbe.”
Have a question? We love talking about all things thin films.
Tell us about your film, substrate and process - a measurement engineer will recommend a configuration, or verify feasibility with a sample measurement.