MPROBE 20 SERIES: THIN FILMS THICKNESS MEASUREMENT

MPROBE 20 Thin film measurement system (single-spot)

MProbe 20 is a thin film thickness measurement desktop system used for thousands of applications worldwide. It measures thin film thickness and refractive index with a single mouse-click. The thicknesses from 1nm – 1mm, including multilayer filmstacks, can be measured quickly and reliably. Different MProbe 20 models are distinguished primarily by wavelength ranges and resolution of spectrometers, which in turn determines the thickness range and types of the materials that can be measured. The measurement technology is based on spectroscopic reflectance – it is fast, reliable and non-destructive.

MProbe 20 Brochure

WHY MPROBE?

Flexible: modular thin film thickness measurement system: select the best configuration for your application and easily upgrade when needed
Precision: unmatched precision <0.01nm or 0.01%
Materials: 500+ extended material database
Software: user friendly and feature rich TFCompanion software can handle even most complex applications.No limit on number of layers, support for backside reflectance, surface roughness, dullness and much more.
Integration: easy integration TCP server
Affordable: unmatched price/performance

MPROBE 20 Series: Thickness ranges

MProbe Thickness Measurement ranges

WHAT IS IN THE BOX

Main unit (includes spectrometer, light source, light controller microprocessor)
SH200A sample table with focusing lens and fine adjustment
Fiberoptics reflectance probe
TFCompanion -RA software, USB dongle(license key), USB memory stick with softwar distribution,User Guide and other materials
Calibration set (bare Si wafer and/or Quartz plate and/or Al mirror) depending on the model and black absorber
Test sample 200nm Si oxide or PET film, depending on the model
USB or LAN cable (for connecting main unit to PC)
24VDC power supply adapter (110/220V)

BASIC SPECIFICATION*:

Precision: <0.01nm or 0.01% (s.d.of 100 measurements on 200nm oxide)

Accuracy: <1nm or 0.2% (filmstack dependent)

Stability:< 0.02nm or 0.2% (daily measurements for 20 days)

Spot size:< 1mm

Sample size: >= 10mm

* see detailed specification for available configurations of MProbe 20 thin film thickness measuremnt system in brochures below

MPROBE 20 MODEL

Wavelength range, nm

Description

Thickness range

Brochure

VIS

400-1000nm

F3 Ariel Spectrometer, 2048 pix CMOS, 16 bit ADC, 5W Tungsten-Halogen lamp

10nm – 150 μm

MProbe20 Vis Brochure(PDF)

MProbe Vis details

UVVIS

Compare to UVVisF system

200nm -1100nm

F3 Ariel Spectrometer, 2048 pix 16 bit ADC 20W TH lamp, 30W Deuterium short-ark lamp

1nm -75μm

mprobe uvvis brochure(pdf)

MProbe UVVis details…

VIS-HR

700nm -1100nm

F4 Spectrometer, 2048 pix (backthinned),16 bit ADC, 5W TH lamp

1μm-400μm

mprobe vishr brochure(pdf)

NIR

900nm-1700nm

F3 NIR spectrometer with InGaAs detector 512 pix., 16 bit ADC, 5W TH lamp

50nm – 150μm

mprobe nir brochure(pdf)

VisNIR

380nm-1700nm

F3 Vis specrometer with 2048 pix CMOS detector;F3 spectrometer with InGaAs detector 512 pix., 16 bit ADC, 5W TH lamp

50nm – 250μm

mprobe VisNir brochure(pdf)

UVVisF

Compare to MProbe UVVis..

200nm-1000nm

F4 spectrometer, Si detector 2048 pixels CCD, 16 bit ADC, 20W Xe flash lamp

1nm – 20μm

mprobe UVVisF brochure(pdf)

MProbeUVVisF details…

UVVISNIR

200nm -1700nm

F4 Spectrometer, 2048 pix (backthinned),16 bit ADC 20W TH lamp, 30W Deuterium short-ark lamp. F4 spectrometer, InGaAs detector 512 pix., 16 bit ADC, 5W TH lamp

1nm -75μm

mprobe uvvinir brochure(pdf)

NIRHR

1500nm – 1550nm

F4 spectrometer, InGaAs detector 512 pix., 16 bit ADC, 5W TH lamp or SLD option

10μm-1800μm (glass) 4μm-400μm (Si)