MPROBE 40 :SMALL SPOT FILMS THICKNESS MEASUREMENT

MPROBE 40 -MSP: Film Thickness measurement in small spot

MProbe 40 measures film thickness and refractive index in small spot with one mouse click. Microspectrophotometer(MSP) combines the power and capability of an inspection type microscope and MProbe measurement unit in a fully integrated system for film thickness measuremnt in small spot. It is used for thousands of applications worldwide and a complete line of standard models is available support them. The thicknesses from 1nm to 2mm, including multilayer filmstacks, can be measured quickly and reliably. Different models are distringuished primarily by wavelength ranges and resolutions of spectrometers, which in turn determined the thickness range that can be measured.

Film thickness measurement in small spot is used in several types of applications:

on cylindrical or curved surfaces – syringes, stents, pins, wires, etc. A small spot creates a flat field to achieve accurate measurement even on a highly curved surface
non-uniform, rough coatings or light scattering material like high haze or nanoparticles infused films. Small spot localize the measurement and minimize the effects of light scattering and non-uniformity
patterned wafers, MEMS and other application requiring high lateral resolution / measurement in small areas.

Long working distance objectives (95 mm parfocal length) are used for comfortable and reliable measurement. Large selection of Visible, NIR and UVVisNIR achromatic objectives is available, depending on application requirements. Why use long working distance objectives- learn more

MProbe 40 Brochure

WHY MPROBE 40?

Flexible modular system: select the best configuration for your application.
Precision: unmatched precision <0.01nm or 0.01%
Materials: 500+ extended material database
Software: user friendly and feature rich TFCompanion software can handle even most complex applications.No limit on number of layers, support for backside reflectance, surface roughness, dullness and much more.
Integrated camera and imaging software allows to pinpoint measurement location and display results directly on the image
Affordable: unmatched price/performance

MPROBE 40 Series: Thickness ranges

WHAT IS IN THE BOX

Main unit (includes spectrometer, light source)
Upright inspection microscope accessory with adapter, 50W TH illuminator, 2MB CMOS camera and 4 objectives turret (one LWD objective included)
Fiberoptics reflectance probe
TFCompanion -RA software, USB dongle(license key), USB memory stick with softwar distribution,User Guide and other materials
Calibration set (bare Si wafer and/or Quartz plate and/or Al mirror) depending on the model and black absorber
Test sample 200nm Si oxide or PET film, depending on the model
USB cable (for connecting main unit to PC)
24VDC power supply adapter (110/220V)

BASIC SPECIFICATION:

Precision: <0.01nm or 0.01% (s.d.of 100 measurements on 200nm oxide)

Accuracy: <1nm or 0.2% (filmstack dependent)

Stability:< 0.02nm or 0.2%

Spot size: 4μm to 200μm (typical- depending on objective used)

Sample size: up to 200 mm

OPTION

DESCRIPTION

COMMENTS

-XY Mapping stage

XY motorized mapping stage with controller ans mapping software support.
150x150mm and 200x200mm options.
Step size: 0.5 μm;
Repeatability: 1μm.

Replacing standard manual microscope stage (275mmx 275) with fine and quick adjustment that is included by default

– Visible and Vis-NIR LWD objectives

-2x lens (200μm measurement)
-10x lens (40μm measurement)
-20x lens (20μm measurement)
-50x lens (8μm measurement)
-100x lens (4μm measurement)
spot sizes listed for standard 400μm fiberoptics

Visible lens: 430nm -900nm wavelength range
VisNIR lens: 450-1700nm wavelength range

Standard LWD parfocal 95mm lenses, mounting thread M26x36TPI (like Mitutoyo) are compatible

– All mirror achromatic objectives

All mirrors Cassegrain objectives:
-10x objective
-15x objective
-20x objective

LWD 95mm parfocal objectives with mounting thread M26x36TPI
Fully covers UVVisNIR system wavelength range:190-1700nm

MPROBE 40 MODEL

Wavelength range, nm

Description

Thickness range

Comments

MPROBE VIS-MSP

400-1000nm

F4 Spectrometer,2048 pixels CCD, 16 bit ADC, 5W Tungsten-Halogen lamp

10nm – 75 μm

Spot size down to 2μm possible with 100x objective and 200μm core fiberoptics

MPROBE UVVISSR-MSP

200nm -1100nm

F4 Spectrometer, 2048 pix (backthinned),16 bit ADC 20W TH lamp, 30W Deuterium short-ark lamp

1nm -75μm

Spot size down to 20μm possible with 40x all reflective objective and 400μm fiberoptics

MPROBE VISHR-MSP

700nm -1100nm

F4 Spectrometer, 2048 pixels CCD (backthinned),16 bit ADC, 5W TH lamp

1μm-400μm

Spot size down to 2μm possible with 100x objective and 200μm fiberoptics

MPROBE NIR-MSP

900nm-1700nm

F4 spectrometer, InGaAs detector 512 pix., 16 bit ADC, 5W TH lamp

50nm – 85μm

Spot size down to 2μm possible with 100x objective and 200μm core fiberoptics

MPROBE UVVISNIR

200nm -1700nm

F4 Spectrometer, 2048 pixels CCD (backthinned),16 bit ADC 20W TH lamp, 30W Deuterium short-ark lamp. F4 spectrometer, InGaAs detector 512 pix., 16 bit ADC, 5W TH lamp

1nm -85μm

Spot size down to 20μm possible with 40x all reflective objective and 400μm fiberoptics

MPROBE UVVisF

200nm -800nm

F4 Spectrometer, 2048 pixels CCD, 16 bit ADC, 10W or 20W Xe flash lamp

1nm -5μm

Spot size down to 20μm possible with 40x all reflective objective and 400μm fiberoptics

MPROBE NIRHR

1500nm – 1550nm

F4 spectrometer, InGaAs detector 512 pixels, 16 bit ADC, 5W TH lamp or SLD option

15μm-1800μm (glass) 5μm-800μm (Si)

Typical spot size used is ~ 80μm to 20μm smaller spot size is possible

MPROBE 40 :SMALL SPOT FILMS THICKNESS MEASUREMENT

MPROBE 40 -MSP: Film Thickness measurement in small spot

WHY MPROBE 40?

WHAT IS IN THE BOX

MPROBE 40 MODEL

Wavelength range, nm

Description

Thickness range

Comments

MPROBE VIS-MSP

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