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MPROBE UVVISF – GATED THIN FILM MEASUREMENT 

MPROBE UVVisF Thin film measurement system

MProbe UVVisF  measures the thickness and refractive index of thin films. It can work in high ambient light environment: in-situ, inline in R&D and production applications. This system is similar to MProbe UVVisSr system but has a shorter wavelength range weighted towards the UV wavelengths. It is designed for applications requiring fast measurement and long lamp life.This system can work in high ambient light environement (e.g. sputtering) because it is using gated acquisition of Xe lamp flashes (~2 µs).  

MProbe UVVisF Brochure

WHY MPROBE UVVisF?

  • Fast measurement on low and high reflectivity samples. Constant/ predictable measurement frequency. Typically, 10Hz – 20Hz 
  • The same unmatched precision as other desktop MProbe systems (<0.01nm) 
  • Can be used in high ambient light environment due to gated acquisition 
  • Materials: 500+ extended material database
  • Software: user friendly and feature rich TFCompanion software can handle even most complex applications.No limit on number of layers, support for backside reflectance, surface roughness, dullness and much more. 
  •    Affordable: unmatched price/performance

MProbe UVVisF:  Measuring thin Tin Oxide on float glass

WHAT IS IN THE BOX

  • Main unit (includes spectrometer, light source)
  • Fiberoptics reflectance probe
  • TFCompanion -RA software, USB dongle(license key), USB memory stick with softwar distribution,User Guide and other materials
  •  Calibration set (bare Si wafer and Quartz plate ) and black absorber
  • Test sample 200nm Si oxide 
  • USB and/or LAN cable 
  • 24VDC power supply adapter (110/220V)

BASIC SPECIFICATION:

  • 20W Xe Flash lamp (1.5mm arc, >20000 hrs lifetime at 10Hz)
  • Precision: <0.01nm or 0.01%
  • Accuracy: <1nm or 0.2% (filmstack dependent)

  • Stability:< 0.02nm or 0.2%

  • Spot size: <1mm

  • Sample size: up to 200 mm

 

 

OPTION

DESCRIPTION

COMMENTS

–  MOD 

TCP-IP remote control (based on modbus protocol)

Software plugin to allow measurement control from the 3rd party software

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