Sample Stage: SH200A

SH200A SAMPLE STAGE

Sample stage SH200A for reflectance and transmittance measurement has a focusing lens and a fine adjustment mechanism. SH200A addresses one of the challenges inherent in the measurement of the thin film thickness on different substrates: an accurate adjustment of the focusing lens distance to the sample*. SH200A is a universal stage- it supports different measurement configurations: reflectance, transmittance, reflectance and transmittance (with manual configuration) and simulteneous reflectance and transmittance measurement. Camera option supports imaging of the measurement location and visualisation/documentation of the measurement results. Sample area accomodates samples up to 200mm. SH200A is included with MProbe 20 system but it can used with any fiberoptics (SMA905 terminated) based reflectance or transmittance setup.

*Measurement of the thickness of the thin films relies on the measurement of absolute reflectance. A reference sample with known reflectivity – typically, Si or quartz- is used. This establishes the relation between measured intensity and absolute reflectivity. The procedure is refered to as “taking baseline” or “calibration”. The measurement conditions has to be maintained unchanged for calibration to remain valid. This means, in particular, that the distance from the lens to the sample should be the same as during the calibration. It is especially important for thicknesses < 50 nm

Sample Stage SH200A Brochure

WHY USE SH200A STAGE?

Easy and reliable measurement of the coatings on samples with different substrate thicknesses
Flexible configuration for reflectance, transmittance or both measurements
Long working distance focusing lens reduces sensitivity to the lens position and makes it easier to see the measured location
Camera option allows to review and document measurement locations and results
Optional support for simultaneous reflectance and transmittance measurement
Affordable and reliable measurement accessory
Supports the measurement of small and large samples (up to 200mm)
Stable solid aluminum construction with rack and pinion height adjustment mechanism

SH200A transmittance configuration

SH200A camera option reflectance measurement measurement

Using camera option (-CAM) with TFCompanion software to view and document the measurement location and results. On many samples light spot is not easily visible – electronic reticle helps to pinpoint measurement location and display the results directly on the image

Camera option (-CAM) configuration of the SH200A stage (top view)

OPTION

DESCRIPTION

COMMENTS

-TO

Transmittance option: includes 2 quartz collimators, transmittance accessory, fiberoptics cable and a set of four stainless legs

Manual configuration si required for switching beteen reflecatnce and transmittance configuration

– TR

TR optioni includes: fiberoptics cable and set of four stainless legs and an integrating sphere

Either reflecatcne of transmittance measurement can be doen without manual reconfiguration of the stage. Supports simultaneous reflectance/Transmittance measurement

-CAM

CAM option includes 2MP camera with imaging lens and holding fixture

Imaging and reviewing/documenting measurement locations on the sample using TFCompanion software. Independent imaging software is also included.

WHY USE SH200A STAGE?

– TR

-CAM

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