TFCOMPANION SOFTWARE: REFLECTANCE, TRANSMITTANCE, ELLIPSOMETRY
TFCompanion software is included with all MProbe systems. It is also available as a standalone software for thin-film data analysis (various versions for reflectance, ellipsometry, imaging ellipsometry, etc.) Software plays a critical role in thin-film thickness measurement. It has two distinct functions that are transparent to the user: control/data acquisition of reflectance data( from the hardware) and data analysis/interpretation.
TFCompanion is a powerful and user friendly software application for thin film analysis and metrology.It combines versatile analytical tools for interpretation of measurement data – to determine actual physical parameters of a filmstack (like thicknesses of the layers and optical properties of the materials).
Analyze: Reflectance, transmittance, ellipsometry spectra together or separately. Supports analysis of Imaging ellipsometry, reflectance, transmittance data. Determine filmstack parameters based on measurement results: thickness, optical constants, surface roughness, bandgap…
Simulate: reflectance/transmittance/ellipsometry spectra from a specified filmstack, determine measurement sensitivity to filmstack parameters
Estimate: measurement repeatability based on selected filmstack and system configuration. Pre-flight optimization of measurement recipe for maximum precision. Includes Large materials library(500+ materials), supports large number of parametrized material types from Cauchy to Tauc-Lorentz to Drude approximations to represent optical constants dispersion for a wide variety of materials and enable n&k measurement.
Imports: measurement data in any text format, specifically supports import from all major ellipsometer/reflectomer instruments
Integrates: with many commercial fiberoptics spectrometers for smooth data acquisition and data analysis
TFCompanion Versions (see brochure for more details):
-R supports reflectance/ transmittance data analysis
-E supports ellipsometry data analysis
-RE supports ellipsometry and Reflectance transmittance data analysis
-REI supports ellipsometry, imaging ellipsometry, reflectance & transmittance data analysis
-RA advanced version reflectance/transmittance and hardware integration (supplied with MProbe)
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Thin film measurement system. Practically, any transluscent film can be measured quickly and reliably.
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