MProbe 60 - automated film thickness mapping
A complete turnkey system for R&D centers and small manufacturing, combining thickness and n, k measurement with mapping automation and small-spot capability. Measure from 1 nm to 2 mm, including multilayer filmstacks.
Overview
MProbe® 60 is a turnkey mapping system used by leading R&D and nanotechnology centers worldwide. It pairs the MProbe measurement engine with a motorized stage and mapping software, so you can characterize thickness and optical constants point-by-point across a full sample. Models differ by spectrometer wavelength range and resolution, which set the measurable thickness range.
Why MProbe 60
- Turnkey mapping automation - flexible and modular, ready to run out of the box.
- Precision - < 0.01 nm or 0.01%.
- 500+ material library for complex, multilayer stacks.
- Integrated camera & imaging - pinpoint the measurement location and display results directly on the image.
- Powerful software - TFCompanion™ with unlimited layers, backside-reflectance, roughness and dullness support.
Configurations & thickness ranges
| Model | Wavelength | Thickness range |
|---|---|---|
| Vis-MAP | 400–1000 nm | 10 nm–75 µm |
| UVVisSR-MAP | 200–1100 nm | 1 nm–75 µm |
| VisHR-MAP | 700–1100 nm | 1–400 µm |
| NIR-MAP | 900–1700 nm | 50 nm–85 µm |
| UVVisNIR-MAP | 200–1700 nm | 1 nm–85 µm |
| NIRHR-MAP | 1500–1550 nm | 10–1800 µm (glass), 4–400 µm (Si) |
Spot sizes down to 2 µm are possible with a 100× objective and 200 µm core fiber; 20 µm with a 40× all-reflective objective and 400 µm fiber.
Options
- XY mapping stage - motorized with controller and mapping software; 150×150 mm, 200×200 mm or 300×300 mm. Step size 0.5 µm, repeatability 1 µm. One stage must be selected.
- Transmission option - attachment for transmittance measurement, including a quartz stage insert, fiber optics, collimator optics and a 45° mirror cube, matched to the system wavelength range.
- LWD objectives - Visible and Vis-NIR (2× through 100×) plus all-mirror Cassegrain achromats (10×, 15×, 20×) covering 190–1700 nm.
What's in the box
- Main unit (spectrometer and light source)
- Solid platform with motorized mapping stage and controller
- Microscope tube on a motorized z-axis stage, or a bracket with standard lens (configuration dependent)
- Fiber-optic reflectance probe
- TFCompanion-RA software, USB license dongle, distribution media and User Guide
- Calibration set and black absorber; test sample (200 nm Si oxide or PET film)
Need thickness maps across a full wafer?
Tell us your sample size and film stack - we'll configure the right stage, objectives and spectrometer.