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MProbe thin-film thickness measurement systems

Every MProbe® system shares the same spectroscopic reflectance engine and TFCompanion™ software. Choose the configuration that fits your samples, spot size and process - then measure thickness, optical constants (n, k) and surface roughness of practically any translucent film.

What We Measure

Thickness, n&k and roughness - from 1 nm to 2 mm.

MProbe systems analyze how light reflects and transmits across UV, visible and NIR wavelengths. Practically any translucent coating or free-standing film can be measured, on substrates from silicon wafers to glass, metal and polymer. Because opacity is a matter of wavelength, even films that appear opaque to the eye - solar absorbers, for example - can be measured in the right spectral window.

MProbe 40 small-spot thin-film measurement system with integrated microscope

Small spot · Manual mapping

MProbe 40

A microspectrophotometer (MSP) that combines an inspection microscope with the MProbe measurement unit. Small-spot measurement for patterned wafers, MEMS, curved parts and fine structures - with camera imaging to pinpoint the exact location and display results directly on the sample image.

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Desktop · Single spot

MProbe 20

The benchtop standard, used in thousands of applications worldwide. Thickness and refractive index from 1 nm to 1 mm with a single mouse-click - modular, and easy to upgrade as your requirements grow.

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MProbe 60 thickness mapping result on a wafer

Mapping automation

MProbe 60

Turnkey small-spot and mapping system for R&D centers and small manufacturing. 1 nm – 2 mm.

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MProbe 20 Vis desktop thin-film measurement system

Economical · Visible

MProbe Vis

Compact, versatile Visible-range desktop system. 10 nm – 150 µm, with a rugged VisX variant for 24/7 lines.

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MProbe UVVis extended-range thin-film measurement system

Extended range · UV–Vis

MProbe UVVis

200–1000 nm range for very thin films and UV-absorbing materials such as TiO₂ and ZnO. Includes the gated UVVisF variant.

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MProbe HC system measuring a coating on a curved headlight surface

Curved surfaces

MProbe HC

Coating measurement on curved and large parts - headlights, lenses and formed optics - using a flexible manual probe.

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MProbe 50 optical configuration for monitoring a deposition chamber

In-situ · Deposition

MProbe 50

Real-time thickness and optical-constant monitoring inside deposition chambers. Gated acquisition supports measurement in high ambient light.

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MProbe 70 measurement head mounted on an inline scanner

Inline · Production lines

MProbe 70

Continuous film and coating thickness measurement on production lines, including roll-to-roll webs. Available in multipoint and scanner configurations.

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Model Line

Compare the MProbe family.

Every line shares the same measurement engine, TFCompanion software and 500+ material library. They differ by form factor, spot size and how they integrate with your process. Within each line, spectrometer wavelength range and resolution are matched to your application.

ModelConfigurationTypical use
MProbe 20Desktop, single spot (< 1 mm)Benchtop R&D and QC - the standard configurationView
MProbe 40 (MSP)Small spot, integrated microscopePatterned wafers, wires, stents, curved & rough partsView
MProbe 50In-situ, gated acquisitionReal-time monitoring inside deposition chambersView
MProbe 60Small spot + XY mapping automationR&D centers and small manufacturing, thickness mapsView
MProbe 70Inline - multipoint or scannerContinuous measurement on 24/7 production linesView
MProbe HCManual probe on Vis platformCoatings on curved and large partsView
MProbe Vis / VisXVisible 400–1000 nm desktopEconomical general-purpose measurement, 10 nm–150 µmView
MProbe UVVis / UVVisFExtended 200–1000 nm desktopVery thin films, UV-absorbing materials, gated variant for high ambient lightView
Spectrometer, Stage & Software

The components behind every system.

Not sure which system fits your samples?

Tell us about your film, substrate and process - a measurement engineer will recommend a configuration or verify feasibility with a sample measurement.

Talk to an engineer