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MProbe 20 - benchtop thin-film measurement

A desktop measurement system used in thousands of applications worldwide. Measure thin-film thickness and refractive index from 1 nm to 1 mm - including multilayer filmstacks - with a single mouse-click.

Overview

MProbe® 20 is the single-spot desktop system at the heart of the MProbe family. Its measurement is based on spectroscopic reflectance - fast, reliable and non-destructive, with no moving parts. Thicknesses from 1 nm to 1 mm, including multilayer filmstacks, are measured quickly and repeatably.

Different MProbe 20 models are distinguished primarily by the wavelength range and resolution of their spectrometers, which in turn set the thickness range and the materials that can be measured. Whatever the configuration, the workflow is the same: focus, click, read the result.

Why MProbe 20

  • Flexible & modular - select the best configuration for your application and upgrade when your requirements grow.
  • Precision - < 0.01 nm or 0.01%.
  • 500+ material library - with dozens of parameterized dispersion models.
  • Powerful software - TFCompanion™ handles the most complex applications: no limit on the number of layers, plus backside-reflectance, surface-roughness and dullness corrections.
  • Easy integration - TCP server interface for process control.
  • Affordable - an unmatched price-to-performance ratio.

Configurations & thickness ranges

MProbe 20 is available across a range of spectrometer configurations. Each pairs an F3 or F4 spectrometer with a matched light source and detector to cover a specific wavelength and thickness range.

ModelWavelength rangeThickness rangeSpectrometer / source
Vis400–1000 nm10 nm–150 µmF3 Ariel, 2048 px CMOS, 5 W TH lamp
UVVis200–1100 nm1 nm–75 µmF3 Ariel, 20 W TH + 30 W Deuterium lamp
Vis-HR700–1100 nm1–400 µmF4, 2048 px backthinned, 5 W TH lamp
NIR900–1700 nm50 nm–150 µmF3 NIR, 512 px InGaAs, 5 W TH lamp
VisNIR380–1700 nm50 nm–250 µmF3 Vis CMOS + F3 InGaAs, 5 W TH lamp
UVVisF200–1000 nm1 nm–20 µmF4, 2048 px CCD, 20 W Xe flash lamp
UVVisNIR200–1700 nm1 nm–75 µmF4 backthinned + F4 InGaAs, TH & Deuterium lamps
NIR-HR1500–1550 nm10–1800 µm (glass), 4–400 µm (Si)F4, 512 px InGaAs, 5 W TH lamp or SLD
Chart of MProbe spectrometer wavelength ranges from UV through NIR
Wavelength ranges spanning UV, visible and near-infrared. See the UVVis systems for the extended-range configurations.

What's in the box

  • Main unit - spectrometer, light source and light-controller microprocessor
  • SH200A sample stage with focusing lens and fine adjustment
  • Fiber-optic reflectance probe
  • TFCompanion-RA software, USB license dongle, distribution media and User Guide
  • Calibration set (bare Si wafer and/or quartz plate and/or Al mirror) plus black absorber
  • Test sample - 200 nm Si oxide or PET film, depending on model
  • USB or LAN cable and 24 V DC power adapter (110/220 V)

Ready to measure your films?

Send us your film, substrate and thickness range - we'll confirm the right MProbe 20 configuration for the job.

Request a Quote

Related measurement applications

Brochures and technical documents