MProbe Vis - film thickness measurement

Overview

MProbe® 20 Vis is a compact, versatile desktop thin-film measurement system. It measures translucent films across a 10 nm–150 µm thickness range on a variety of substrates while remaining economical and easy to use. The production version, VisX, is designed to withstand vibration and operate 24/7 over a LAN connection - suitable for inline and OEM applications and compatible with cleanroom environments.

MProbe 20 VisX improves sensitivity at longer wavelengths (> 700 nm) by roughly 50% versus the standard Vis, with a smoother spectral response. Using an S16514 CMOS detector, this improved IR sensitivity especially benefits the measurement of thick films (> 20 µm) and films with low reflectivity in this range, such as films on silicon substrates.

How it works - the parts that matter

The system looks simple - spectrometer, light source, reflectance probe, focusing lens and software - but its performance comes from careful integration refined since 2008, most recently updated in 2022.

• Ariel spectrometer - astigmatism-corrected (toroidal mirror) for 4–5× more light collection and uniform wavelength resolution across the spectrum. Because thick-film measurement relies on the 700–1000 nm range, that uniform resolution extends measurable thickness from ~50 µm to ~150 µm. A CMOS detector enables data acquisition down to 10 µs, and firmware temperature calibration (typ. 14–45 °C) removes drift.
• 5 W TH light source - 10,000-hour lifetime, constant-current driver for stable output as the lamp ages, tool-free replacement with no alignment, no forced cooling, and ~1 ms measurement on a typical silicon wafer.
• SH200A sample stage - a focusing lens (~65 mm working distance) gives a < 1 mm spot with low sensitivity to tilt, plus a fine adjustment to match the calibration distance when substrate thickness changes.
• TFCompanion™ software - a full-stack analysis package that is simple enough for a production technician yet capable enough for a university or R&D lab.

Why MProbe Vis

• Compact, economical and easy to use
• VisX variant hardened for vibration and continuous 24/7 operation
• Cleanroom-compatible; USB and 1 Gb LAN interfaces
• Each system is assembled to order, individually tested and built in the USA

What's in the box

• Main measurement unit (spectrometer and light source)
• Fiber-optic reflectance probe
• SH200A sample stage with focusing lens
• TFCompanion-RA software, USB license dongle, distribution media and User Guide
• USB and/or LAN cable, 24 V DC power adapter (110/220 V)