MProbe 40 - small-spot film thickness measurement
A microspectrophotometer (MSP) that combines the power of an inspection microscope with the MProbe® measurement unit. Measure thickness and refractive index in a small spot with one click - from 1 nm to 2 mm, including multilayer filmstacks.
Overview
MProbe® 40-MSP integrates an inspection-grade microscope and an MProbe measurement unit into a single system for small-spot film-thickness measurement. A large selection of standard models supports thousands of applications worldwide. As with the rest of the family, models are distinguished primarily by spectrometer wavelength range and resolution, which set the measurable thickness range.
Where small-spot measurement matters
- Cylindrical and curved surfaces - syringes, stents, pins and wires. A small spot creates a locally flat field for accurate measurement even on highly curved parts.
- Non-uniform, rough or scattering coatings - high-haze or nanoparticle-infused films. The small spot localizes the measurement and minimizes the effects of scattering and non-uniformity.
- Patterned wafers and MEMS - and any application requiring high lateral resolution or measurement in small areas.
Long-working-distance objectives (95 mm parfocal length) make navigation comfortable and reliable. A large selection of Visible, NIR and UV-Vis-NIR achromatic objectives is available. Because these LWD objectives keep numerical aperture below 0.55, they minimize the interference-contrast loss that high-NA microscope optics introduce - preserving measurement accuracy across practically all filmstacks.
Why MProbe 40
- Flexible & modular - select the best configuration for your application.
- Precision - < 0.01 nm or 0.01%.
- 500+ material library with a rich dispersion-model set.
- Integrated camera & imaging - pinpoint the measurement location and display results directly on the sample image.
- Powerful software - TFCompanion™ handles unlimited layers with backside-reflectance, roughness and dullness corrections.
Configurations & thickness ranges
| Model | Wavelength | Thickness range | Smallest spot |
|---|---|---|---|
| Vis-MSP | 400–1000 nm | 10 nm–75 µm | 2 µm (100× objective, 200 µm fiber) |
| UVVisSR-MSP | 200–1100 nm | 1 nm–75 µm | 20 µm (40× all-reflective objective) |
| VisHR-MSP | 700–1100 nm | 1–400 µm | 2 µm |
| NIR-MSP | 900–1700 nm | 50 nm–85 µm | 2 µm |
| UVVisNIR-MSP | 200–1700 nm | 1 nm–85 µm | 20 µm |
| UVVisF-MSP | 200–800 nm | 1 nm–5 µm | 20 µm |
| NIRHR-MSP | 1500–1550 nm | 15–1800 µm (glass), 5–800 µm (Si) | ~20–80 µm typical |
Objectives & options
- XY mapping stage - motorized, with controller and mapping software. 150×150 mm and 200×200 mm options; 0.5 µm step size, 1 µm repeatability. Replaces the standard 275×275 mm manual stage.
- Visible & Vis-NIR LWD objectives - 2× (200 µm spot), 10× (40 µm), 20× (20 µm), 50× (8 µm) and 100× (4 µm), for a standard 400 µm fiber. Visible lens 430–900 nm; Vis-NIR lens 450–1700 nm.
- All-mirror achromatic (Cassegrain) objectives - 10×, 15× and 20×, covering the full 190–1700 nm UV-Vis-NIR range.
Standard LWD parfocal 95 mm lenses with an M26×36 TPI mounting thread (Mitutoyo-compatible) can be used.
Have a small or curved sample?
Stents, wires, patterned wafers or rough coatings - tell us about your part and we'll recommend the objective and configuration.